Plasma Diagnostics Lab.
Plasma Diagnostics Lab.
□ Spatially Resolved OES
- In-situ analysis of radical formation and ionization behaviors in plasma
□ Laser Induced Fluorescence
- Spectroscopic method used for studying structure of molecules, detection of selective species and flow visualization and measurements
□ Langmuir Probe
- Measurement of electron temperature, electron density, and electric potential of a plasma
□ Mass Spectroscopy (QMS)
- Measurement of relative amounts of different gases in a plasma
- Commonly known as a Residual Gas Analyzer (RGA)
□ IR Camera
- Measurement of heat flux, target surface temperature, substrate surface temperature and distribution during plasma processing


Spatially Resolved OES
- In-situ analysis of radical formation and ionization behaviors in plasma


Laser Induced Fluorescence
- Spectroscopic method used for studying structure of molecules, detection of selective species and flow visualization and measurements


Langmuir Probe
- Measurement of electron temperature, electron density, and electric potential of a plasma


Mass Spectroscopy (QMS)
- Measurement of relative amounts of different gases in a plasma
- Commonly known as a Residual Gas Analyzer (RGA)


IR Camera
- Measurement of heat flux, target surface temperature, substrate surface temperature and distribution during plasma processing